Publication:
Physical characterization of ultra-thin high k dielectrics
Date
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-16T15:22:39Z | |
| dc.date.available | 2021-10-16T15:22:39Z | |
| dc.date.issued | 2007-02 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11898 | |
| dc.source.beginpage | 337 | |
| dc.source.book | Dielectric Films for Advanced Microelectronics | |
| dc.source.endpage | 366 | |
| dc.title | Physical characterization of ultra-thin high k dielectrics | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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