Publication:

DTCO and TCAD for a 12 layer-EUV ultra-scaled surrounding gate transistor 6T-SRAM

Date

2018

Proceedings Paper

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Files

43252.pdf 1.98 MB

Author(s)

Matagne, Philippe

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;

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Kikuchi, Yoshiaki

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Huynh Bao, Trong

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Devriendt, Katia

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Ragnarsson, Lars-Ake

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Boemmels, Juergen

;

Mallik, Arindam

;

Altamirano Sanchez, Efrain

;

;

Lorant, Christophe

;

Jourdan, Nicolas

;

Porret, Clément

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;

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Statistics

1 since deposited on 2021-10-25

Acq. date: 2026-04-25

2002 since deposited on 2021-10-25

Acq. date: 2026-04-25