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Reliability of ultra-thin gate oxides below 3 nm in the direct tunneling regime
Publication:
Reliability of ultra-thin gate oxides below 3 nm in the direct tunneling regime
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Date
1996
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Depas, Michel
;
Degraeve, Robin
;
Nigam, Tanya
;
Groeseneken, Guido
;
Heyns, Marc
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1897
since deposited on 2021-09-29
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Acq. date: 2025-12-15
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Metrics
Views
1897
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-15
Citations