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Vapor phase doping with N-type dopant into silicon by atmospheric pressure chamical vapor deposition
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Vapor phase doping with N-type dopant into silicon by atmospheric pressure chamical vapor deposition
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Takeuchi, Shotaro
;
Nguyen, Duy
;
Leys, Frederik
;
Loo, Roger
;
Conard, Thierry
;
Vandervorst, Wilfried
;
Caymax, Matty
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1844
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Acq. date: 2025-12-15
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Metrics
Views
1844
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-15
Citations