Optimization of reactive ion etching of Al0.48In0.52As in CH4/H2 by  the experimental  design method

Publication:

1995

Journal article

Author(s)

Carpi, Enio

;

Van Hove, Marleen

;

Alay, Josep Lluis

;

Van Rossum, Marc

J. Vac. Sci. Technol. B

2092 since deposited on 2021-09-29

Acq. date: 2026-02-01