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Optimization of reactive ion etching of Al0.48In0.52As in CH4/H2 by the experimental design method
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2091 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-11
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Views
2091 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-11
Citations