Publication:

Growth and material characterization of hafnium titanates deposited by atomic layer deposition

Date

2009

Journal article

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Files

18068.pdf 349.34 KB

Author(s)

Popovici, Mihaela Ioana

;

Delabie, Annelies

;

Van Elshocht, Sven

;

;

Pourtois, Geoffrey

;

;

;

Tomida, Kazuyuki

;

;

;

;

Detavernier, Christophe

;

Journal

Journal of the Electrochemical Society

Metrics

1961 since deposited on 2021-10-18

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Acq. date: 2026-01-08