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Growth and material characterization of hafnium titanates deposited by atomic layer deposition
Publication:
Growth and material characterization of hafnium titanates deposited by atomic layer deposition
Date
2009
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Popovici, Mihaela Ioana
;
Delabie, Annelies
;
Van Elshocht, Sven
;
Clima, Sergiu
;
Pourtois, Geoffrey
;
Swerts, Johan
;
Nyns, Laura
;
Tomida, Kazuyuki
;
Menou, Nicolas
;
Wouters, Dirk
;
Opsomer, Karl
;
Detavernier, Christophe
;
Kittl, Jorge
Journal
Journal of the Electrochemical Society
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1957
since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations
Metrics
Views
1957
since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations