Publication:

The Impact of Process Steps on Nearly Ideal Subthreshold Slope in 300-mm Compatible InGaZnO TFTs

Date

2025-MAY

Journal article

https://doi.org/10.1109/LED.2025.3549865

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Author(s)

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Subhechha, Subhali

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Matsubayashi, Daisuke

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van Setten, Michiel

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Dekkers, Harold

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Subramanian, Shruthi

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Rassoul, Nouredine

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Afanas'ev, Valeri

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Kar, Gouri Sankar

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Belmonte, Attilio

Journal

IEEE ELECTRON DEVICE LETTERS

Statistics

106 since deposited on 2025-05-22

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Acq. date: 2026-01-26