Publication:
Ga-doped Ge and [B + Ga] Co-doped SiGe epitaxial source-drain for Sub-7 nm logic devices
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2082 since deposited on 2021-10-26
Acq. date: 2025-12-11
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Views
2082 since deposited on 2021-10-26
Acq. date: 2025-12-11
Citations