Publication:

Poly-SiGe as novel MEMS-CMOS integration technology

Date

2004-04
Proceedings Paper
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Author(s)

Pieters, Philip
;
Borzi, Raffaella
;
Witvrouw, Ann

Journal

Abstract

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1977 since deposited on 2021-10-15
Acq. date: 2026-03-07

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1977 since deposited on 2021-10-15
Acq. date: 2026-03-07

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