Publication:

Poly-SiGe as novel MEMS-CMOS integration technology

Date

2004-04
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorPieters, Philip
dc.contributor.authorBorzi, Raffaella
dc.contributor.authorWitvrouw, Ann
dc.contributor.imecauthorPieters, Philip
dc.contributor.imecauthorBorzi, Raffaella
dc.date.accessioned2021-10-15T15:28:06Z
dc.date.available2021-10-15T15:28:06Z
dc.date.issued2004-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9431
dc.source.conferenceSemicon Europe 2004, International MEMS/MST Industry Forum
dc.source.conferencedate19/04/2004
dc.source.conferencelocation
dc.title

Poly-SiGe as novel MEMS-CMOS integration technology

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions