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Applications of dynamic surface annealing for high-performance Si and Ge based MOS devices
Publication:
Applications of dynamic surface annealing for high-performance Si and Ge based MOS devices
Date
2011
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rosseel, Erik
;
Everaert, Jean-Luc
;
Hikavyy, Andriy
;
Witters, Liesbeth
;
Mitard, Jerome
;
Vandervorst, Wilfried
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1943
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1943
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations