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Use of MIR-FTIR and k-value measurements to assess potential solutions to reduce damage during porous low-k integration
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1979 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-11
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Metrics
Views
1979 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-11
Citations