Publication:
Atomic layer deposition of hafnium titanates dielectric layers
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1990 since deposited on 2021-10-17
Acq. date: 2026-04-06
Citations
Statistics
Views
1990 since deposited on 2021-10-17
Acq. date: 2026-04-06
Citations