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Articles
Chemical mechanical polishing of InP
Publication:
Chemical mechanical polishing of InP
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ong, Patrick
;
Peddeti, Shivaji
;
Leunissen, Peter
;
Babu, S.V.
Journal
ECS Journal of Solid State Science and Technology
Abstract
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1991
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Statistics
Views
1991
since deposited on 2021-10-20
6
last month
4
last week
Acq. date: 2026-01-25
Citations