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Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits
Publication:
Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits
Date
2024
Journal article
https://doi.org/10.1002/aelm.202400035
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Erofeev, Ivan
;
Hartanto, Antony Winata
;
Saidov, Khakimjon
;
Aabdin, Zainul
;
Pacco, Antoine
;
Philipsen, Harold
;
Tjiu, Weng Weei
;
Hui, Hui Kim
;
Holsteyns, Frank
;
Mirsaidov, Utkur
Journal
ADVANCED ELECTRONIC MATERIALS
Abstract
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92
since deposited on 2024-07-04
Acq. date: 2025-10-23
Views
634
since deposited on 2024-07-04
Acq. date: 2025-10-23
Citations
Metrics
Downloads
92
since deposited on 2024-07-04
Acq. date: 2025-10-23
Views
634
since deposited on 2024-07-04
Acq. date: 2025-10-23
Citations