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First demonstration of ferroelectric Si:Hf0(2) based 3D FE-FET with trench architecture for dense non-volatile memory application
Publication:
First demonstration of ferroelectric Si:Hf0(2) based 3D FE-FET with trench architecture for dense non-volatile memory application
Date
2021
Proceedings Paper
https://doi.org/10.1109/IMW51353.2021.9439620
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Banerjee, Kaustuv
;
Breuil, Laurent
;
Milenin, Alexey
;
Pak, Murat
;
Stiers, Jimmy
;
McMitchell, Sean
;
Di Piazza, Luca
;
Van den Bosch, Geert
;
Van Houdt, Jan
Journal
na
Abstract
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1841
since deposited on 2022-03-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1841
since deposited on 2022-03-17
Acq. date: 2025-10-23
Citations