Publication:

First demonstration of ferroelectric Si:Hf0(2) based 3D FE-FET with trench architecture for dense non-volatile memory application

Date

2021
Proceedings Paper
https://doi.org/10.1109/IMW51353.2021.9439620
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Author(s)

Banerjee, Kaustuv  
;
Breuil, Laurent  
;
Milenin, Alexey  
;
Pak, Murat  
;
Stiers, Jimmy  
;
McMitchell, Sean  
;
Di Piazza, Luca  
;
Van den Bosch, Geert  
;
Van Houdt, Jan  

Journal

na

Abstract

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