Publication:
First demonstration of ferroelectric Si:Hf0(2) based 3D FE-FET with trench architecture for dense non-volatile memory application
| dc.contributor.author | Banerjee, Kaustuv | |
| dc.contributor.author | Breuil, Laurent | |
| dc.contributor.author | Milenin, Alexey | |
| dc.contributor.author | Pak, Murat | |
| dc.contributor.author | Stiers, Jimmy | |
| dc.contributor.author | McMitchell, Sean | |
| dc.contributor.author | Di Piazza, Luca | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Van Houdt, Jan | |
| dc.contributor.imecauthor | Banerjee, Kaustuv | |
| dc.contributor.imecauthor | Breuil, Laurent | |
| dc.contributor.imecauthor | Milenin, Alexey | |
| dc.contributor.imecauthor | Pak, Murat | |
| dc.contributor.imecauthor | Stiers, Jimmy | |
| dc.contributor.imecauthor | McMitchell, Sean | |
| dc.contributor.imecauthor | Di Piazza, Luca | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Van Houdt, Jan | |
| dc.contributor.orcidimec | Banerjee, Kaustuv::0000-0001-8003-6211 | |
| dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
| dc.contributor.orcidimec | Milenin, Alexey::0000-0003-0747-0462 | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.contributor.orcidimec | Van Houdt, Jan::1234-1234-1234-1235 | |
| dc.date.accessioned | 2022-03-17T11:08:24Z | |
| dc.date.available | 2022-03-17T11:08:24Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IMW51353.2021.9439620 | |
| dc.identifier.eisbn | 978-1-7281-8517-0 | |
| dc.identifier.issn | 2330-7978 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39483 | |
| dc.publisher | IEEE | |
| dc.source.beginpage | 32 | |
| dc.source.conference | IEEE International Memory Workshop (IMW) | |
| dc.source.conferencedate | MAY 16-19, 2021 | |
| dc.source.conferencelocation | Virtual | |
| dc.source.endpage | 35 | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | First demonstration of ferroelectric Si:Hf0(2) based 3D FE-FET with trench architecture for dense non-volatile memory application | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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