Publication:

First demonstration of ferroelectric Si:Hf0(2) based 3D FE-FET with trench architecture for dense non-volatile memory application

 
dc.contributor.authorBanerjee, Kaustuv
dc.contributor.authorBreuil, Laurent
dc.contributor.authorMilenin, Alexey
dc.contributor.authorPak, Murat
dc.contributor.authorStiers, Jimmy
dc.contributor.authorMcMitchell, Sean
dc.contributor.authorDi Piazza, Luca
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorBanerjee, Kaustuv
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorPak, Murat
dc.contributor.imecauthorStiers, Jimmy
dc.contributor.imecauthorMcMitchell, Sean
dc.contributor.imecauthorDi Piazza, Luca
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecBanerjee, Kaustuv::0000-0001-8003-6211
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::1234-1234-1234-1235
dc.date.accessioned2022-03-17T11:08:24Z
dc.date.available2022-03-17T11:08:24Z
dc.date.issued2021
dc.identifier.doi10.1109/IMW51353.2021.9439620
dc.identifier.eisbn978-1-7281-8517-0
dc.identifier.issn2330-7978
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39483
dc.publisherIEEE
dc.source.beginpage32
dc.source.conferenceIEEE International Memory Workshop (IMW)
dc.source.conferencedateMAY 16-19, 2021
dc.source.conferencelocationVirtual
dc.source.endpage35
dc.source.journalna
dc.source.numberofpages4
dc.title

First demonstration of ferroelectric Si:Hf0(2) based 3D FE-FET with trench architecture for dense non-volatile memory application

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections: