Defect profiling in FEFET Si:HfO2 layers

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Author(s)

O'Sullivan, Barry

;

;

Izmailov, Roman

;

Afanas'ev, Valeri V.

;

;

;

Higashi, Yusuke

;

Degraeve, Robin

;

Truijen, Brecht

;

;

;

McMitchell, Sean

;

Banerjee, Kaustuv

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;

Breuil, Laurent

;

Van den Bosch, Geert

;

Linten, Dimitri

;

Journal

Applied Physics Letters

Metrics

2043 since deposited on 2021-10-29

Acq. date: 2025-10-24