Publication:
Impact of process optimizations on the electrical performance of high-k layers deposited by aqueous chemical solution deposition
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1766 since deposited on 2021-10-17
2last month
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Acq. date: 2026-10-10
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Statistics
Views
1766 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-10-10
Citations