Publication:

Impact of process optimizations on the electrical performance of high-k layers deposited by aqueous chemical solution deposition

Date

2008
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorHardy, An
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorRichard, Olivier
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorMullens, J.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-17T11:47:27Z
dc.date.available2021-10-17T11:47:27Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14639
dc.source.beginpageG91
dc.source.endpageG95
dc.source.issue4
dc.source.journalJournal of the Electrochemical Society
dc.source.volume155
dc.title

Impact of process optimizations on the electrical performance of high-k layers deposited by aqueous chemical solution deposition

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
17334.pdf
Size:
576.93 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles