Publication:

Insights into the effect of TiN thickness scaling on DC and AC NBTI characteristics in replacement metal gate pMOSFETs

Date

2020
Journal article
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Author(s)

Zhou, L.
;
Liu, Q.
;
Yang, H.
;
Ji, Z.
;
Xu, H.
;
Tang, B.
;
Simoen, Eddy  
;
Jiang, H.
;
Luo, Y.
;
Wang, X.
;
Ma, X.
;
Li, Y.
;
Luo, J.
;
Yin, H.
;
Zhao, C.
;
Wang, W.

Journal

IEEE Transactions on Device and Materials Reliability

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2046 since deposited on 2021-10-29
2last month
Acq. date: 2026-02-24

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2046 since deposited on 2021-10-29
2last month
Acq. date: 2026-02-24

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