Publication:

Mechanical stability of airgaps in nano-interconnects

Date

2020

Journal article

https://doi.org/10.1016/j.microrel.2020.113597

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Author(s)

Vanstreels, Kris

;

Zahedmanesh, Houman

;

Gonzalez, Mario

Journal

MICROELECTRONICS RELIABILITY

Metrics

1865 since deposited on 2021-11-02

Acq. date: 2025-12-15