Publication:

Immersion lithography and double patterning in advanced microelectronics

Date

2010

Proceedings Paper

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Files

20511.pdf 5.4 MB

Author(s)

Vandeweyer, Tom

;

;

Ercken, Monique

;

;

;

Truffert, Vincent

;

Verhaegen, Staf

;

Versluijs, Janko

;

;

;

Vandenberghe, Geert

;

Maenhoudt, Mireille

Statistics

1953 since deposited on 2021-10-18

Acq. date: 2026-03-17