Publication:

Immersion lithography and double patterning in advanced microelectronics

Date

2010
Proceedings Paper
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Author(s)

Vandeweyer, Tom  
;
Bekaert, Joost  
;
Ercken, Monique  
;
Gronheid, Roel  
;
Miller, Andy  
;
Truffert, Vincent  
;
Verhaegen, Staf
;
Versluijs, Janko  
;
Wiaux, Vincent  
;
Wong, Patrick  
;
Vandenberghe, Geert  
;
Maenhoudt, Mireille

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1957 since deposited on 2021-10-18
Acq. date: 2026-09-19

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