Publication:
An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory
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1250 since deposited on 2023-01-23
1last month
Acq. date: 2026-04-05
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1250 since deposited on 2023-01-23
1last month
Acq. date: 2026-04-05
Citations