An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory

dc.contributor.author	Verreck, Devin
dc.contributor.author	Arreghini, Antonio
dc.contributor.author	Van den Bosch, Geert
dc.contributor.author	Rosmeulen, Maarten
dc.contributor.imecauthor	Verreck, Devin
dc.contributor.imecauthor	Arreghini, Antonio
dc.contributor.imecauthor	Van den Bosch, Geert
dc.contributor.imecauthor	Rosmeulen, Maarten
dc.contributor.orcidimec	Verreck, Devin::0000-0002-3833-5880
dc.contributor.orcidimec	Arreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimec	Van den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimec	Rosmeulen, Maarten::0000-0002-3663-7439
dc.date.accessioned	2023-06-30T13:17:23Z
dc.date.available	2023-01-23T03:17:50Z
dc.date.available	2023-06-30T13:17:23Z
dc.date.issued	2023
dc.identifier.doi	10.1016/j.sse.2022.108498
dc.identifier.issn	0038-1101
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/41017
dc.publisher	PERGAMON-ELSEVIER SCIENCE LTD
dc.source.beginpage	Art.: 108498
dc.source.endpage	na
dc.source.issue	January
dc.source.journal	SOLID-STATE ELECTRONICS
dc.source.numberofpages	3
dc.source.volume	199
dc.title	An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory
dc.type	Journal article
dspace.entity.type	Publication
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