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Leakage optimatisation of ultra-shallow junctions formed by solid phase epitaxial regrowth (SPER)
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1951 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-11
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Metrics
Views
1951 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-11
Citations