Publication:

Machine Learning on Multiplexed Optical Metrology Pattern Shift Response Targets to Predict Electrical Properties

Date

2024
Journal article
https://doi.org/10.1109/TSM.2023.3339330
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Published version 3.99 MB

Author(s)

Ashby, Tom  
;
Truffert, Vincent  
;
Cerbu, Dorin  
;
Ausschnitt, Kit  
;
Charley, Anne-Laure  
;
Verachtert, Wilfried  
;
Wuyts, Roel  

Journal

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

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175 since deposited on 2024-03-26
Acq. date: 2026-06-26

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611 since deposited on 2024-03-26
Acq. date: 2026-06-26

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