Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors
Publication:
Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors
Copy permalink
Date
2022
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Published version
7.04 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dupuy, Emmanuel
;
Capogreco, Elena
;
Dentoni Litta, Eugenio
;
Tao, Zheng
;
Sebaai, Farid
;
Spessot, Alessio
;
Horiguchi, Naoto
Journal
Abstract
Description
Statistics
Views
1458
since deposited on 2023-01-09
6
last month
Acq. date: 2026-08-29
Citations
Statistics
Views
1458
since deposited on 2023-01-09
6
last month
Acq. date: 2026-08-29
Citations