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Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors
Publication:
Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors
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Date
2022-09-20
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dupuy, Emmanuel
;
Capogreco, Elena
;
Dentoni Litta, Eugenio
;
Tao, Zheng
;
Sebaai, Farid
;
Spessot, Alessio
;
Horiguchi, Naoto
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1411
since deposited on 2023-01-09
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Acq. date: 2025-12-15
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Metrics
Views
1411
since deposited on 2023-01-09
3
last month
Acq. date: 2025-12-15
Citations