Publication:
Advanced electrical characterization toward (sub) 1nm EOT HfSiON – hole trapping in PFET and L-dependent effects
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1900 since deposited on 2021-10-16
Acq. date: 2025-10-23
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Views
1900 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations