Publication:
RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
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33269 since deposited on 2021-09-29
1last month
Acq. date: 2026-09-14
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Statistics
Views
33269 since deposited on 2021-09-29
1last month
Acq. date: 2026-09-14
Citations