Publication:
RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
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33261 since deposited on 2021-09-29
2last month
Acq. date: 2025-12-11
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Views
33261 since deposited on 2021-09-29
2last month
Acq. date: 2025-12-11
Citations