Publication:

RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

Date

1994
Journal article
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dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorBender, Hugo
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:40:27Z
dc.date.available2021-09-29T12:40:27Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/103
dc.source.beginpage389
dc.source.endpage395
dc.source.issue4
dc.source.journalVacuum
dc.source.volume45
dc.title

RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

dc.typeJournal article
dspace.entity.typePublication
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