Publication:

Performance assessment of (110) p-FET high-k/MG: is it mobility or series resistance limited?

Date

2007
Journal article
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Author(s)

Trojman, Lionel
;
Pantisano, Luigi
;
Severi, Simone  
;
San Andres Serrano, Enrique
;
Hoffmann, Thomas Y.
;
Ferain, Isabelle
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Maes, Herman
;
Groeseneken, Guido  

Journal

Microelectronic Engineering

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1926 since deposited on 2021-10-16
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1926 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-10

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