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Performance assessment of (110) p-FET high-k/MG: is it mobility or series resistance limited?

Date

2007
Journal article
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dc.contributor.authorTrojman, Lionel
dc.contributor.authorPantisano, Luigi
dc.contributor.authorSeveri, Simone
dc.contributor.authorSan Andres Serrano, Enrique
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorFerain, Isabelle
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorMaes, Herman
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-16T20:17:52Z
dc.date.available2021-10-16T20:17:52Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12994
dc.source.beginpage2058
dc.source.endpage2062
dc.source.issue9_10
dc.source.journalMicroelectronic Engineering
dc.source.volume84
dc.title

Performance assessment of (110) p-FET high-k/MG: is it mobility or series resistance limited?

dc.typeJournal article
dspace.entity.typePublication
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