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On the origin of the mobility reduction in bulk-Si, UTBOX-FDSOI and SiGe devices with ultrathin-EOT dielectrics

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1883 since deposited on 2021-10-19
Acq. date: 2025-10-23

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1883 since deposited on 2021-10-19
Acq. date: 2025-10-23

Citations