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Application of x-ray fluorescence spectrometry in charaterization of high-k uktra-thin films
Publication:
Application of x-ray fluorescence spectrometry in charaterization of high-k uktra-thin films
Date
2003
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Chao
;
Brijs, Bert
;
Dortu, Fabian
;
De Gendt, Stefan
;
Caymax, Matty
;
Heyns, Marc
;
Besling, W.
;
Maes, Jan
Journal
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1948
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1948
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations