Publication:
Widely tunable work function TaN/Ru stacking layer on HfLaO gate dielectric
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1956 since deposited on 2021-10-17
1last month
Acq. date: 2026-03-17
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Statistics
Views
1956 since deposited on 2021-10-17
1last month
Acq. date: 2026-03-17
Citations