Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

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Published version 2.15 MB

Author(s)

Marinov, Daniil

;

de Marneffe, Jean-Francois

;

;

Arutchelvan, Goutham

;

Bal, Kristof M.

;

Voronina, Ekaterina

;

Rakhimova, Tatyana

;

Mankelevich, Yuri

;

El Kazzi, Salim

;

Nalin Mehta, Ankit

;

Wyndaele, Pieter-Jan

;

Heyne, Markus Hartmut

;

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With, Patrick C.

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Banerjee, Sreetama

;

;

Asselberghs, Inge

;

;

De Gendt, Stefan

Journal

NPJ 2D MATERIALS AND APPLICATIONS

Metrics

208 since deposited on 2022-02-22

Acq. date: 2025-10-23

1932 since deposited on 2022-02-22

Acq. date: 2025-10-23