Publication:

Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

Date

2021
Journal article
https://doi.org/10.1038/s41699-020-00197-7
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dc.contributor.authorMarinov, Daniil
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorSmets, Quentin
dc.contributor.authorArutchelvan, Goutham
dc.contributor.authorBal, Kristof M.
dc.contributor.authorVoronina, Ekaterina
dc.contributor.authorRakhimova, Tatyana
dc.contributor.authorMankelevich, Yuri
dc.contributor.authorEl Kazzi, Salim
dc.contributor.authorNalin Mehta, Ankit
dc.contributor.authorWyndaele, Pieter-Jan
dc.contributor.authorHeyne, Markus Hartmut
dc.contributor.authorZhang, Jianran
dc.contributor.authorWith, Patrick C.
dc.contributor.authorBanerjee, Sreetama
dc.contributor.authorNeyts, Erik C.
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorLin, Dennis
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorMarinov, Daniil
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorSmets, Quentin
dc.contributor.imecauthorArutchelvan, Goutham
dc.contributor.imecauthorEl Kazzi, Salim
dc.contributor.imecauthorNalin Mehta, Ankit
dc.contributor.imecauthorWyndaele, Pieter-Jan
dc.contributor.imecauthorHeyne, Markus Hartmut
dc.contributor.imecauthorZhang, Jianran
dc.contributor.imecauthorWith, Patrick C.
dc.contributor.imecauthorBanerjee, Sreetama
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidextBal, Kristof M.::0000-0003-2467-1223
dc.contributor.orcidextVoronina, Ekaterina::0000-0001-7946-215X
dc.contributor.orcidextNeyts, Erik C.::0000-0002-3360-3196
dc.contributor.orcidimecde Marneffe, Jean-Francois::0000-0001-5178-6670
dc.contributor.orcidimecNalin Mehta, Ankit::0000-0002-2169-940X
dc.contributor.orcidimecWyndaele, Pieter-Jan::0000-0003-4010-8377
dc.contributor.orcidimecSmets, Quentin::0000-0002-2356-5915
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecBanerjee, Sreetama::0000-0002-6297-9547
dc.date.accessioned2022-02-22T13:43:33Z
dc.date.available2022-02-22T13:43:33Z
dc.date.issued2021
dc.identifier.doi10.1038/s41699-020-00197-7
dc.identifier.issn2397-7132
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39014
dc.publisherNATURE RESEARCH
dc.source.beginpage17
dc.source.issue1
dc.source.journalNPJ 2D MATERIALS AND APPLICATIONS
dc.source.numberofpages10
dc.source.volume5
dc.subject.keywordsIRREVERSIBLE ADSORPTION
dc.subject.keywordsDENSITY
dc.subject.keywordsMOS2
dc.subject.keywordsPHOTOLUMINESCENCE
dc.subject.keywordsPOLYMERS
dc.subject.keywordsGRAPHENE
dc.subject.keywordsSILICON
dc.subject.keywordsFILMS
dc.title

Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

dc.typeJournal article
dspace.entity.typePublication
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