Publication:

Application of HCl etch in the production of novel devices

Date

2008
Meeting abstract
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16946.pdf 44.52 KB

Author(s)

Hikavyy, Andriy  
;
Rooyackers, Rita
;
Verheyen, Peter  
;
Vellianitis, Georgios  
;
Van Dal, Mark  
;
Lander, Rob
;
Loo, Roger  
;
Caymax, Matty  

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