Publication:

Application of HCl etch in the production of novel devices

Date

2008
Meeting abstract
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dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVellianitis, Georgios
dc.contributor.authorVan Dal, Mark
dc.contributor.authorLander, Rob
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVellianitis, Georgios
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-17T07:42:11Z
dc.date.available2021-10-17T07:42:11Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13881
dc.source.beginpage647
dc.source.conference213th ECS Meeting
dc.source.conferencedate18/05/2008
dc.source.conferencelocationPhoenix, AZ USA
dc.title

Application of HCl etch in the production of novel devices

dc.typeMeeting abstract
dspace.entity.typePublication
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