Publication:

N5 technology node dual-damascene interconnects enabled using multi patterning

Date

2017
Proceedings Paper
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Author(s)

Briggs, Basoene  
;
Wilson, Chris  
;
Devriendt, Katia  
;
van der Veen, Marleen  
;
Decoster, Stefan  
;
Paolillo, Sara  
;
Versluijs, Janko  
;
Kesters, Els  
;
Sebaai, Farid  
;
Jourdan, Nicolas  
;
El-Mekki, Zaid  
;
Heylen, Nancy  
;
Verdonck, Patrick  
;
Wan, Danny  
;
Varela Pedreira, Olalla  
;
Croes, Kristof  
;
Dutta, Shibesh
;
Ryckaert, Julien  
;
Mallik, Arindam  
;
Lariviere, Stephane  
;
Boemmels, Juergen  
;
Tokei, Zsolt  

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2018 since deposited on 2021-10-24
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Acq. date: 2026-05-16

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