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Challenges and improvements for 3D-IC integration using ultra thin (25μm) devices
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Challenges and improvements for 3D-IC integration using ultra thin (25μm) devices
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Date
2012-06
Proceedings Paper
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24489.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
La Manna, Antonio
;
Buisson, Thibault
;
Detalle, Mikael
;
Rebibis, Kenneth June
;
Velenis, Dimitrios
;
Zhang, Wenqi
;
Beyne, Eric
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Acq. date: 2025-12-11
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since deposited on 2021-10-20
Acq. date: 2025-12-11
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1
since deposited on 2021-10-20
Acq. date: 2025-12-11
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2017
since deposited on 2021-10-20
Acq. date: 2025-12-11
Citations