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Role of bath composition in electroless Cu seeding on Co liner for through-Si vias
Publication:
Role of bath composition in electroless Cu seeding on Co liner for through-Si vias
Date
2015-01
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Inoue, Fumihiro
;
Philipsen, Harold
;
van der Veen, Marleen
;
Van Huylenbroeck, Stefaan
;
Armini, Silvia
;
Struyf, Herbert
;
Tanaka, Tetsu
Journal
ECS Journal of Solid State Science and Technology
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1880
since deposited on 2021-10-22
Acq. date: 2025-11-01
Citations
Metrics
Views
1880
since deposited on 2021-10-22
Acq. date: 2025-11-01
Citations