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Scaled X-bar TiN/HfO2/TiN RRAM cells processed with optimised plasma enhanced atomic layer deposition (PEALD) for TiN electrode

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1929 since deposited on 2021-10-21
4last month
Acq. date: 2026-10-13

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Views

1929 since deposited on 2021-10-21
4last month
Acq. date: 2026-10-13

Citations