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Scaled X-bar TiN/HfO2/TiN RRAM cells processed with optimised plasma enhanced atomic layer deposition (PEALD) for TiN electrode
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1918 since deposited on 2021-10-21
Acq. date: 2025-12-16
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Views
1918 since deposited on 2021-10-21
Acq. date: 2025-12-16
Citations