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(A)thermal migration of Ge during junction formation in a-Si layers grown on thin SiGe-buffer layers
Publication:
(A)thermal migration of Ge during junction formation in a-Si layers grown on thin SiGe-buffer layers
Date
2004
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Pawlak, Bartek
;
Janssens, Tom
;
Brijs, Bert
;
Delhougne, Romain
;
Caymax, Matty
;
Loo, Roger
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2018
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
2018
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations