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ESD diodes with Si/SiGe superlattice I/O finFET architecture in a vertically stacked horizontal nanowire technology

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1861 since deposited on 2021-10-26
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Acq. date: 2026-08-06

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1861 since deposited on 2021-10-26
1last month
1last week
Acq. date: 2026-08-06

Citations