Physical characterization of mixed HfAlOx layers by complementary analysis techniques

Bender, Hugo; Conard, Thierry; Richard, Olivier; Brijs, Bert; Petry, Jasmine; Vandervorst, Wilfried; Defranoux, C.; Boher, P.; Rochat, N.; Wyon, C.; Mack, P.; Wolstenholme, J.; Vitchev, E.; Houssiau, L.; Pireaux, J-J.; Bergmaier, A.; Dollinger, G.

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Physical characterization of mixed HfAlOx layers by complementary analysis techniques

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2004

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Vandervorst, Wilfried

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Materials Science and Engineering B

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Physical characterization of mixed HfAlOx layers by complementary analysis techniques

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