Publication:

Physical characterization of mixed HfAlOx layers by complementary analysis techniques

Date

2004
Journal article
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dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorRichard, Olivier
dc.contributor.authorBrijs, Bert
dc.contributor.authorPetry, Jasmine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDefranoux, C.
dc.contributor.authorBoher, P.
dc.contributor.authorRochat, N.
dc.contributor.authorWyon, C.
dc.contributor.authorMack, P.
dc.contributor.authorWolstenholme, J.
dc.contributor.authorVitchev, E.
dc.contributor.authorHoussiau, L.
dc.contributor.authorPireaux, J-J.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-15T12:42:11Z
dc.date.available2021-10-15T12:42:11Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8559
dc.source.beginpage60
dc.source.endpage63
dc.source.journalMaterials Science and Engineering B
dc.source.volume109
dc.title

Physical characterization of mixed HfAlOx layers by complementary analysis techniques

dc.typeJournal article
dspace.entity.typePublication
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