Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

Zhou, Chun; Kurosawa, Tsuyoshi; Dazai, Takahiro; Doise, Jan; Ren, Jiaxing; Bezik, Cody; Segal-Peretz, Tamar; Gronheid, Roel; Rincon Delgadillo, Paulina; Yamazaki,, Akiyoshi; de Pablo, Juan; Nealey, Paul

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Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

Date

2018

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Rincon Delgadillo, Paulina

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Yamazaki,, Akiyoshi

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de Pablo, Juan

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Nealey, Paul

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

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Acq. date: 2025-12-13

Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

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