Publication:
Epitaxial growth of group IV and III-V alloy channel stacks on 300 mm Si substrates for sub-14 nm CMOS generations
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1837 since deposited on 2021-10-20
1last month
Acq. date: 2026-05-18
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Statistics
Views
1837 since deposited on 2021-10-20
1last month
Acq. date: 2026-05-18
Citations