Publication:
Epitaxial growth of group IV and III-V alloy channel stacks on 300 mm Si substrates for sub-14 nm CMOS generations
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1835 since deposited on 2021-10-20
Acq. date: 2025-12-16
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Views
1835 since deposited on 2021-10-20
Acq. date: 2025-12-16
Citations